An Improved Lumped Element Model for Circular-Shape pMUTs

This paper presents an improved lumped element model for clamped, circular-shape, piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent circuit is developed to include electrical, mechanical, and acoustic domains, which are analyzed separately combined with the associated couplings. For first time, a two-term mode shape approach adapted reveal intrinsic extrinsic properties of pMUT, such as parameters, input impedance, velocity, displacement, bandwidth, quality factor, directivity, on-axis pressure in near far field. These compared prior reports literature exact solutions, well Finite Element Method (FEM) simulations. The errors relative solution all these below 0.5%. improvements error from 5x about 3 orders magnitude better than those works. As such, could be helpful design simulation tools pMUTs.